Polyimide MEMS Fabrication Services
Group Leader Biomedical Micro and Nano Engineering
We offer microfabrication services for custom polymer MEMS components and devices using polyimide and parylene technology. Our focus is on biomedical systems and sensors for aggressive environments.
Our team brings together expertise in microfabrication, assembly and packaging, and device integration. We support research teams, startups, and OEMs in prototyping, iteration, and pilot production of application-specific devices.
Microfabrication
- Fabrication on 100 mm wafers
- Spin-coating of polyimide films (2–10 μm)
- Parylene C deposition (2–30 µm)
- Photolithography on flexible substrates (>5 µm L/S standard)
- Sputter deposition of Au, Pt, Ti, Cr, TiN, and ITO
- Etching and lift-off processing
- Adhesion promoter optimization
Specifications listed are typical. Other substrate sizes, materials and dimensions are available on request.
- Wire-bonding
- Flip-chip bonding
- Precision microassembly of flexible components
- Adhesive bonding
- Process design and technology transfer
- Device design (2D/3D CAD)
- Photomask layout
- Material and design compatibility consulting
- Design of PCBs, electronics, and connectors (Omnetics, Molex, etc.)
- Optical and electrical inspection (IV, impedance)
- Electrochemical testing (impedance spectroscopy, cyclic voltammetry, charge injection capacity, potentiometry, amperometry)
- Accelerated aging and application testing
- Failure analysis (FIB-SEM, TEM, EDX)
- Requirements Engineering: We define the layer stack, material selections, resolution limits, and test requirements based on your application and device function.
- Process Design: We develop and document an optimized fabrication process flow. We can support co-development or fully manage the process chain.
- Fabrication: Devices are fabricated in NMI cleanroom facilities. All materials and steps are traceable. Assembly is performed in a dedicated packaging lab.
- QA and test engineering: Optical inspection, functional testing (electrical/electrochemical), and optional accelerated aging or stability studies.
- Flexible neural probes and microelectrode arrays
- Microsensors for microfluidic or organ-on-chip platforms
- Thin-film sensors for wearable or implantable systems
- High-density flexible interconnects and ribbon cables
- Biomedical research devices and in vitro diagnostics
NMI Natural and Medical Sciences Institute
at the University of Tübingen
Markwiesenstraße 55, 72770 Reutlingen
Tel.: +49 7121 51530-0
Mail:
info@nmi.de
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