Production of Solid State Nanopores

Dr. Peter D. Jones
Group Leader Biomedical Micro and Nano Engineering

The research field of solid-state nanopores and nanofluidics deals with the development and characterization of nanometer-sized channels in solid-state materials to control the flow of molecules, liquids or gases.

This technology has applications in areas such as biosensing, energy, and environmental monitoring. Solid-state nanopores and nanofluidics provide the ability to measure or control the transport of molecules and ions through these channels. Thus, this technology provides a means to explore fundamental phenomena at the nanoscale, thereby providing insight into the behavior of fluids and materials at extremely small scales.

A test series of solid-state nanopores fabricated by helium ion milling with variable ion dose. HIM enables rapid prototyping with single-digit nanometer resolution

Our methods, which enable rapid prototyping at the nanometer or even atomic scale, rely on the following devices:

  • JEOL ARM 200F High Resolution Transmission Electron Microscope (TEM/STEM) with CEOS Cs corrector
  • Zeiss Crossbeam 550 (Gallium FIB/SEM mit EDX, EBID, Kleindiek micromanipulator, Cryo)
  • Zeiss Auriga 40 (Gallium FIB/SEM)
  • Zeiss Orion Nanofab (Helium FIB), am LISA+, Tübingen

In addition, we offer expertise in plasma and wet chemical modification and surface functionalization, e.g. by silane chemistry.