Novel nanoscale functional coatings with plasma-assisted atomic layer deposition (ALD) for miniaturized elastomeric sealing components
Novel nanoscale functional coatings with plasma-assisted atomic layer deposition (ALD) for miniaturized elastomeric sealing components.
The aim of the project is to develop novel nanoscale functional coatings as well as suitable plasma-assisted and chemically induced deposition processes (atomic layer deposition ALD), with which the sliding, wear and barrier properties of elastomeric microcomponents can be significantly improved and guaranteed in the long term, depending on the requirements, without negatively affecting the substrate properties in the process.