Ihr Ansprechpartner
Dr. Claus J. Burkhardt

Tel: 07121 51530-55

Microsystems and nanotechnology

The NMI is involved in the design, development, production, and testing of application-specific microsystems
made from biostable and biocompatible materials.
We cover the entire value added chain – from the idea to standardized small series production.

Our clean room infrastructure and equipment enable us to deposit and structure layers on rigid and flexible
substrates for biotechnology and biomedical products.
We use both physical vapor deposition (PVD) and plasma-enhanced chemical vapor deposition (PECVD).
Photolithography (max. substrate size 10x 11 cm or 6-inch circle) is used to expose substrates to generate
microstructures down to a resolution of 1 μm.