Microsystems engineering
We develop innovative devices and systems and fabricate them in our cleanroom in Reutlingen. Our focus is on microsystems for applications in aggressive environments, including integration with fluidics and medical sensors.
Are you interested in consultation to get started or to solve a problem? Or do you need specific processes? We’d be happy to help!
We are closely networked with other institutes of the Innovation Alliance Baden-Württemberg and regional companies and universities. If your challenge needs broader expertise, we know who else to bring on board.
Technological processes in the NMI cleanroom
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Category |
Process |
Machine |
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Assembly and packaging |
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Wire bonding |
Wire bonder DelvoTec 5610 |
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Flipchip |
Fineplacer |
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Gluing |
Gluing bench, plasma cleaner, dispensing system |
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Dicing (Si, Glas, Quarz) |
Wafer saw Disco DAD3220 |
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CVD (Chemical Vapour Deposition) |
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Parylene |
Comelec C-30-H (Parylene / PECVD) |
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SiN, SiO |
Oxford Plasmalab 800 PECVD |
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Dry etching and plasma treatment |
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Plasma treatment |
Piccolo (O2, N2, Ar, SiO2 deposition) |
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Reactive-ion etching (RIE) |
Oxford Plasmalab 800 (O2, CF4) |
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Dry etching |
Leybold Z 550 |
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Laser processing |
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Cutting |
LPKF ProtoLaser U Universal Laser Systems ULTRA R5000 |
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Welding |
LPKF PowerWeld 2600 Eco |
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Lithography |
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Spin-coating |
Spin-coater RC8 with hotplate Spin-coater Convac SÜSS Gamma 4M (automatic) |
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Exposure |
SÜSS MA6 mask aligner SÜSS MA200 Compact mask aligner (automatic) |
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Developing |
SÜSS Gamma 4M (automatic) |
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Lamination of dry film resist |
Laminator SKY 335R6 |
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Metrology |
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Impedance spectroscopy |
Solartron SI 1260 Impedance Analyzer |
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Optical profilometry |
Keyence Laser Scanning Mikroskope |
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Profilometry |
Bruker DektakXT |
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Sheet resistance |
4-point measuring station |
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3D material analysis |
FIB/SEM Zeiss Crossbeam 550; EDX Detector Zeiss Crossbeam 1540 with Leica VCT100 cryo Zeiss Auriga 40 |
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Interface analysis |
Jeol ARM 200F High Resolution TEM/STEM with CEOS Cs corrector |
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Surface topography |
Atomic Force Microscope Bruker Innova |
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Light microscope system |
Zeiss Axioimager Z2.M |
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Light microscope system |
Zeiss SmartZoom |
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Polymer thin film deposition |
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Polyimide |
Spin-coater PI-Convac & Koyo oven |
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Parylene |
Comelec C-30-H (Parylene / PECVD) |
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Spin-coating PDMS |
Spin-coater Convac (dedicated PDMS lab) |
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PVD (Physical Vapour Deposition) |
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Sputter deposition |
Porta (various) Leybold Z 550 (Au, Pt, Cr, Ti) Leybold Z 700 (ITO, Ti, Ir) Leybold L560 (TiN) |
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Wet etching and processing |
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Hydrofluoric acid etching |
Nassbank |
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Microelectroplating (Au, Ni, …) |
Microelectroplating system NBT |