We have developed an array of 25 electrically addressable field emitters. This device is a very suitable tool for experimentally designing miniaturized electron sources with improved emission characteristics. The field emission tip itself is fabricated by a combination of electron beam induced deposition and physical vapor deposition. Thus it is possible to vary the geometrical setup of tip and extraction electrode easily and also to define the emitter material exactly. The influence of most important parameters on the tip shape has been examined and deposition of three-dimensional structures is shown. Analysis of Fowler–Nordheim-plots indicates that during first operation and increased exposure to argon, nitrogen, and oxygen a change in tip radius is the predominant effect. Two arrays of field emitters with different tip heights have been examined to show the variation in emission pattern and current distribution. J Vac Sci Tech