Visualization and in situ contacting of carbon nanotubes in a scanning electron microscope.

Visualization and in situ contacting of carbon nanotubes in a scanning electron microscope.
Croitoru MD, Bertsche G, Kern DP, Burkhardt C, Bauerdick S, Sahakalkan S, Roth S
J. Vac. Sci. Technol. 2005; B 23 (6): 2789-2792. DOI: 10.1116/1.2130350

A method for contacting carbon nanotubes on an insulating surface is presented. Tubes which are already connected to prefabricated electrodes can be visualized in the scanning electron microscope exploiting voltage contrast at low beam energies. Additional connections to tubes identified in this way are fabricated by in situ electron beam induced deposition from metalorganic precursors such as tungsten hexacarbonyl. A resistivity of 0.15Ωcm before annealing has been achieved so far with this material. J Vac Sci Tech